Global Semiconductor Dry Etch Systems Market Size & Outlook

The global semiconductor dry etch systems market size was estimated at USD 15,955.1 million in 2024 and is projected to reach USD 22,370.0 million by 2030, growing at a CAGR of 5.9% from 2025 to 2030.
Revenue, 2024 (US$M)
$15,955.1
Forecast, 2030 (US$M)
$22,370.0
CAGR, 2025 - 2030
5.9%
Report Coverage
Worldwide

Global semiconductor dry etch systems market, 2018-2030 (US$M)

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Global semiconductor dry etch systems market highlights

  • The global semiconductor dry etch systems market generated a revenue of USD 15,955.1 million in 2024 and is expected to reach USD 22,370.0 million by 2030.
  • The market is expected to grow at a CAGR (2025 - 2030) of 5.9% by 2030.
  • In terms of segment, etching deep reactive ion etching (drie) accounted for a revenue of USD 7,217.8 million in 2024.
  • Etching Deep Reactive Ion Etching (DRIE) is the most lucrative etching technique segment registering the fastest growth during the forecast period.
  • In terms of region, Asia Pacific was the largest revenue generating market in 2024.
  • Country-wise, China is expected to register the highest CAGR from 2025 to 2030.

Global data book summary

Market revenue in 2024USD 15,955.1 million
Market revenue in 2030USD 22,370.0 million
Growth rate5.9% (CAGR from 2025 to 2030)
Largest segmentEtching deep reactive ion etching (drie)
Fastest growing segmentEtching Deep Reactive Ion Etching (DRIE)
Historical data covered2018 - 2023
Base year for estimation2024
Forecast period covered2025 - 2030
Quantitative unitsRevenue in USD million
Market segmentationReactive Ion Etching (RIE), Inductively Coupled Plasma (ICP), Etching Deep Reactive Ion Etching (DRIE)

Other key industry trends

  • In terms of revenue, the North America accounted for 10.4% of the global semiconductor dry etch systems market in 2024.
  • By country, the Taiwan is projected to lead the global market in terms of revenue in 2030.
  • By country, China is the fastest growing regional market and is projected to reach USD 3,735.5 million by 2030.

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Semiconductor Dry Etch Systems Market Companies

Name Profile # Employees HQ Website
Amac View profile 501-1000 Utrecht, Utrecht, The Netherlands, Europe https://www.amac.nl
Sipel Electronic View profile 1-10 Meinier, Geneve, Switzerland, Europe http://www.sipel.ch/
Ted Pella Inc. View profile 101-250 Redding, California, United States, North America http://tedpella.com
H-Square Corporation View profile 11-50 Santa Clara, California, United States, North America https://www.h-square.com
Tokyo Electron Ltd View profile 17204 Akasaka Biz Tower, 3-1 Akasaka 5-chome, Minato-ku, Tokyo, Japan, 107-6325 http://www.tel.co.jp
Lam Research Corp View profile 17200 4650 Cushing Parkway, Fremont, CA, United States, 94538 https://www.lamresearch.com
Applied Materials Inc View profile 34000 3050 Bowers Avenue, P.O. Box 58039, Santa Clara, CA, United States, 95052-8039 https://www.appliedmaterials.com
KLA Corp View profile 15210 One Technology Drive, Milpitas, CA, United States, 95035 https://www.kla.com
Shin-Etsu Chemical Co Ltd View profile 25717 6-1, Ohtemachi 2-chome, Chiyoda-ku, Tokyo, Japan, 100-0004 http://www.shinetsu.co.jp
Nitto Denko Corp View profile 28193 4-20, Ofuka-Cho, 33rd Floor, Grand Front Osaka, Kita-Ku, Osaka, Japan, 530-0011 http://www.nitto.com

Global semiconductor dry etch systems market outlook

The databook is designed to serve as a comprehensive guide to navigating this sector. The databook focuses on market statistics denoted in the form of revenue and y-o-y growth and CAGR across the globe and regions. A detailed competitive and opportunity analyses related to semiconductor dry etch systems market will help companies and investors design strategic landscapes.


Etching deep reactive ion etching (drie) was the largest segment with a revenue share of 45.24% in 2024. Horizon Databook has segmented the Global semiconductor dry etch systems market based on reactive ion etching (rie), inductively coupled plasma (icp), etching deep reactive ion etching (drie) covering the revenue growth of each sub-segment from 2018 to 2030.


  • Global Semiconductor Dry Etch Systems Etching Technique Outlook (Revenue, USD Million, 2018-2030)
    • Reactive Ion Etching (RIE)
    • Inductively Coupled Plasma (ICP)
    • Etching Deep Reactive Ion Etching (DRIE)
  • Global Semiconductor Dry Etch Systems Application Outlook (Revenue, USD Million, 2018-2030)
    • Logic and Memory
    • MEMS and Sensors
    • Power Devices
  • Global Semiconductor Dry Etch Systems End Use Outlook (Revenue, USD Million, 2018-2030)
    • Consumer Electronics
    • Automotive
    • Telecommunications

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Horizon Databook provides a detailed overview of global-level data and insights on the Global semiconductor dry etch systems market , including forecasts for subscribers. This global databook contains high-level insights into Global semiconductor dry etch systems market from 2018 to 2030, including revenue numbers, major trends, and company profiles.

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Global semiconductor dry etch systems market size, by regions, 2018-2030 (US$M)

Top 10 countries: Semiconductor dry etch systems market size, 2024 (US$M)

Global semiconductor dry etch systems market share, by etching technique, 2024 & 2030 (%, US$M)

Semiconductor dry etch systems market: Opportunity assessment by country

Global semiconductor dry etch systems market, by region, 2024 (US$M)

Global semiconductor dry etch systems market size, by regions, 2018-2030 (US$M)

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